Probe assisted localized doping of aluminum into silicon substrates
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DOI: 10.1063/1.5065385
Abstract: Precise control of dopant placement is crucial for the reproducible, and reliable, nanoscale semiconductor device fabrication. In this paper, we demonstrate an atomic force microscopy (AFM) probe assisted localized doping of aluminum into an n-type… read more here.
Keywords: localized doping; microscopy; probe assisted; doping aluminum ... See more keywords