Mode localized MEMS transducers with voltage-controlled linear coupling
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa6652
Abstract: Recent studies have demonstrated mode localized resonant micro-electro-mechanical systems (MEMS) sensing devices with orders of magnitude improvement in sensitivity. Avoided crossings or eigenvalue veering is the physical mechanism exploited to achieve the enhancement in sensitivity… read more here.
Keywords: linear coupling; mems transducers; mode; localized mems ... See more keywords