Electrostatically driven long-microbeams for low frequency applications
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DOI: 10.1049/el.2017.4534
Abstract: This Letter presents the design, fabrication and characterisation of an array of electrostatically actuated clamped-clamped microbeams. A large bottom actuation electrode and long beams with lengths ranging from 1 to 3.4 mm are the major… read more here.
Keywords: long microbeams; frequency; driven long; resonant frequency ... See more keywords