Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2021.3126981
Abstract: Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because… read more here.
Keywords: flexure guide; nanopositioning stage; long stroke; stage ... See more keywords
Binocular Vision-Based Method Used for Determining the Static and Dynamic Parameters of the Long-Stroke Shakers in Low-Frequency Vibration Calibration
Sign Up to like & getrecommendations! Published in 2023 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2022.3208559
Abstract: The long-stroke shaker is essentially required for the calibration of low-frequency vibration transducers, whose performance parameters have significant impact on the calibration accuracy. The accurate measurement of these parameters is the prerequisite to establish a… read more here.
Keywords: calibration; long stroke; dynamic parameters; based method ... See more keywords
Accumulated Error Reduction of Linear Motor Mover Position Measurement Based on SKLM
Sign Up to like & getrecommendations! Published in 2023 at "IEEE Transactions on Industrial Informatics"
DOI: 10.1109/tii.2022.3192670
Abstract: Cumulative measurement error is the most critical factor affecting the accuracy of long-stroke displacement measurement. Based on the 1-D image gradient method and smooth Kalman filter algorithm, this article proposes a long-stroke linear motor displacement… read more here.
Keywords: long stroke; error; linear motor; reduction ... See more keywords
Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
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DOI: 10.3390/mi13030412
Abstract: In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached… read more here.
Keywords: piezoelectric walking; long stroke; actuator; wafer probe ... See more keywords