A closed-loop readout interface for MEMS accelerometer with time-multiplexing electrostatic force feedback
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DOI: 10.1142/s0217984919504475
Abstract: The noise and linearity performance of a MEMS accelerometer is a critical issue for land seismic acquisition applications. Incorporating closed-loop force feedback is an effective way to enhance th... read more here.
Keywords: loop readout; mems accelerometer; closed loop; force feedback ... See more keywords