High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform
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DOI: 10.1109/tthz.2020.3019928
Abstract: In this article, we present an ultrahigh-Q cavity at terahertz (THz) frequencies. The designed cavity is built on a low-loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized… read more here.
Keywords: suspended silicon; low loss; loss suspended; cavity ... See more keywords