Optimization of structures of DC RF MEMS series switches for low actuation
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DOI: 10.1007/s00542-016-3063-4
Abstract: This paper presents the design and simulation of low actuation DC RF MEMS ohmic series switches. The proposed switches are suitable for applications to be used in the frequency range from DC to 10 GHz. Therefore… read more here.
Keywords: structures mems; low actuation; series; optimization structures ... See more keywords
Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage
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DOI: 10.3390/mi11020171
Abstract: Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, low power consumption, and abrupt switching characteristics. Nevertheless, the widespread application of MEMS relays has been… read more here.
Keywords: low actuation; mems relay; cantilever mems; actuation voltage ... See more keywords