Effects of ultra-low ethylene partial pressure on microstructure and composition of reactively sputter-deposited Ta–C thin films
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DOI: 10.1016/j.tsf.2019.137440
Abstract: Abstract We report on the effects of low ethylene (C2H4) partial pressures (6.7 × 10−5 ≤ Pc ≤ 6.7 × 10−2 Pa) on the composition and microstructure of Ta–C thin films grown on MgO(001) substrates via ultra-high vacuum dc magnetron sputtering of a TaC… read more here.
Keywords: thin films; spectroscopy; microstructure; low ethylene ... See more keywords