Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization
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DOI: 10.3390/app13084959
Abstract: This study reports the chemical vapor deposition of amorphous boron carbonitride films on Si(100) and SiO2 substrates using a trimethylamine borane and nitrogen mixture. BCxNy films with different compositions were produced via variations in substrate… read more here.
Keywords: boron carbonitride; lpcvd; composition; carbonitride films ... See more keywords