The Characteristics and Reliability With Channel Length Dependent on the Deposited Sequence of SiO₂ and Si₃N₄ as PV in LTPS TFTs
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DOI: 10.1109/tdmr.2024.3379743
Abstract: This study investigates the characteristics on different channel lengths for a sequence of Si3N4 and SiO2 deposition as PV of LTPS TFTs. After analyzing the subthreshold swing (SS) of the initial condition and change in… read more here.
Keywords: length; degradation; ltps tfts; sequence ... See more keywords