Effect of isopropanol on gold assisted chemical etching of silicon microstructures
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.02.008
Abstract: Abstract Wet etching is an essential and complex step in semiconductor device processing. Metal-Assisted Chemical Etching (MacEtch) is fundamentally a wet but anisotropic etching method. In the MacEtch technique, there are still a number of… read more here.
Keywords: isopropanol gold; gold assisted; effect isopropanol; chemical etching ... See more keywords
Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Nanomaterials"
DOI: 10.1155/2018/5479605
Abstract: Metal-assisted chemical etching (MacEtch) has attracted considerable attention for its ability to fabricate micro- and nanostructures with high aspect ratios and its applications in other microelectromechanical fields. However, few studies have reported the effect of… read more here.
Keywords: chemical etching; effect; effect photoillumination; assisted chemical ... See more keywords