Solving the optimal machine allocation problem with fuzzy set-based method in the semiconductor fabrication
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DOI: 10.1016/j.promfg.2020.10.208
Abstract: Abstract In a semiconductor manufacturing fabrication, a production line of chemical mechanical polishing (CMP), one of the key semiconductor processes for the wafer planarization, will be arranged by a machine allocation decision twice a day.… read more here.
Keywords: machine allocation; semiconductor; allocation problem;