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Published in 2017 at "Frontiers of Mechanical Engineering"
DOI: 10.1007/s11465-017-0410-9
Abstract: Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to…
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Keywords:
machining technologies;
micro nano;
nano machining;
machining ... See more keywords