Origins of epitaxial macro-terraces and macro-steps on GaN substrates
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DOI: 10.1063/5.0147667
Abstract: Localized lattice distortions in GaN substrates can serve as nucleation sites for epitaxial macro-steps and macro-terraces. These detrimental macro-scale features give rise to optically hazy homoepitaxial GaN surfaces. After nucleating, these macro-features grow laterally along… read more here.
Keywords: gan substrates; terraces macro; epitaxial macro; macro steps ... See more keywords