Synthesis of magnesium nitride films with BN as protective layers by reactive radio-frequency magnetron sputtering
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DOI: 10.1016/j.tsf.2020.138271
Abstract: Abstract Magnesium nitride films were synthesized on silicon substrates by reactive radio-frequency magnetron sputtering (13.56 MHz) with a high-purity magnesium target and nitrogen as the working gas. The effects of the sputtering power and the growth… read more here.
Keywords: reactive radio; magnesium nitride; frequency magnetron; radio frequency ... See more keywords
Crystalline magnesium nitride ( Mg3N2 ): From epitaxial growth to fundamental physical properties
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DOI: 10.1103/physrevmaterials.4.054601
Abstract: Single-crystalline $\mathrm{M}{\mathrm{g}}_{3}{\mathrm{N}}_{2}$ thin films are grown on MgO (100) substrates with plasma-assisted molecular beam epitaxy. To prevent the oxidation of the $\mathrm{M}{\mathrm{g}}_{3}{\mathrm{N}}_{2}$ films and allow further physical characterization, a polycrystalline MgO cap is deposited in… read more here.
Keywords: mathrm films; magnesium nitride; crystalline magnesium; mathrm ... See more keywords