Simulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target
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DOI: 10.1016/j.vacuum.2021.110421
Abstract: Abstract In this work, thermal processes occurring in the sputtering unit of a DC magnetron with a hot titanium target are studied. The processes are described within the framework of a stationary heat problem with… read more here.
Keywords: sputtering unit; thermal processes; magnetron hot; unit ... See more keywords