Plasma studies of a linear magnetron operating in the range from DC to HiPIMS
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DOI: 10.1063/1.5017857
Abstract: Plasma properties of magnetrons have been extensively studied in the past with the focus on small, research-style magnetrons with planar disk targets. In this contribution, we report on plasma diagnostics of a linear magnetron because… read more here.
Keywords: studies linear; plasma studies; magnetron operating; linear magnetron ... See more keywords