Articles with "magnetron reactive" as a keyword



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Photocarrier dynamic measurement of rutile TiO2 films prepared by RF magnetron reactive sputtering

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Published in 2017 at "Journal of Alloys and Compounds"

DOI: 10.1016/j.jallcom.2017.01.146

Abstract: Abstract In this work, rutile titanium dioxide (TiO 2 ) films were prepared on quartz and SiO 2 /Si substrates utilizing RF magnetron reactive sputtering technology. Crystal structure, surface morphology and optical property of these… read more here.

Keywords: films prepared; photocarrier dynamic; magnetron reactive; rutile ... See more keywords
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Application of p-type NiO deposited by magnetron reactive sputtering on GaN vertical diodes

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Published in 2021 at "Materials Science in Semiconductor Processing"

DOI: 10.1016/j.mssp.2020.105628

Abstract: Abstract In this study, p-NiO deposited by magnetron reactive sputtering was adopted to fabricate NiO/GaN heterojunction and edge termination structure for vertical GaN Schottky barrier diodes. The contact properties of the NiO/GaN heterojunction were evaluated… read more here.

Keywords: nio; diode; nio deposited; deposited magnetron ... See more keywords