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Published in 2025 at "Advanced science"
DOI: 10.1002/advs.202512193
Abstract: Heterogeneously integrated devices have great demand for the freestanding wafer‐level wide bandgap semiconductors in their single crystal membrane form. However, the current fabrication strategy is quite costly and low throughput. Here, quasi van der Waals…
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Keywords:
gan based;
wafer scale;
scale manufacturing;
manufacturing crack ... See more keywords