The Impact of Manufacturing Imperfections on the Performance of Metalenses and a Manufacturing-Tolerant Design Method
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DOI: 10.3390/mi13091531
Abstract: Metalenses play an important role in optoelectronic integrated devices, given their advantages in miniaturization and integration. Due to its high aspect ratio subwavelength structure, fabricating metalenses requires a high-level dry etching technology. Consequently, structure deformation… read more here.
Keywords: impact manufacturing; manufacturing tolerant; design method; performance ... See more keywords