Large-Margin Extreme Learning Machines With Hybrid Features for Wafer Map Defect Recognition
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Transactions on Instrumentation and Measurement"
DOI: 10.1109/tim.2024.3374295
Abstract: The critical information regarding the semiconductor manufacturing can be provided based on the wafer map defect patterns. Automatic wafer map defect identification with machine learning methods has recently received increasing attention. The wafer map defect… read more here.
Keywords: map defect; extreme learning; wafer map; defect recognition ... See more keywords
Wafer Map Defect Pattern Recognition Using Rotation-Invariant Features
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Semiconductor Manufacturing"
DOI: 10.1109/tsm.2019.2944181
Abstract: In semiconductor manufacturing, the patterns on the wafer map provide important information for engineers to identify the root causes of production problems. The detection and recognition of wafer map patterns is thus an important issue… read more here.
Keywords: invariant features; wafer map; rotation invariant; map defect ... See more keywords
Wafer map defect classification using deep learning framework with data augmentation on imbalance datasets
Sign Up to like & getrecommendations! Published in 2025 at "EURASIP Journal on Image and Video Processing"
DOI: 10.1186/s13640-025-00666-3
Abstract: Wafer map defect classification is a key task for the semiconductor industry to improve the yield rate. Most wafer map defect classifications suffer from the problem of data imbalance and insufficient data. This paper proposes… read more here.
Keywords: classification; map defect; using deep; wafer map ... See more keywords