Wafer Map Defect Pattern Recognition Using Rotation-Invariant Features
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DOI: 10.1109/tsm.2019.2944181
Abstract: In semiconductor manufacturing, the patterns on the wafer map provide important information for engineers to identify the root causes of production problems. The detection and recognition of wafer map patterns is thus an important issue… read more here.
Keywords: invariant features; wafer map; rotation invariant; map defect ... See more keywords