Numerical investigation of wafer drying induced by the thermal Marangoni effect
Sign Up to like & getrecommendations! Published in 2019 at "International Journal of Heat and Mass Transfer"
DOI: 10.1016/j.ijheatmasstransfer.2018.11.149
Abstract: Abstract Marangoni drying induced by organic vapor is an important process in integrated circuit manufacturing to obtain an ultra-clean surface, but its application is limited by the utilization of flammable vapor. Thermal Marangoni drying induced… read more here.
Keywords: water; drying induced; marangoni drying; thermal marangoni ... See more keywords