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Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12193464
Abstract: In this article, we present a systematic investigation on a multistep nanosphere lithography technique to uncover its potential in fabricating a wide range of two- and three-dimensional nanostructures. A tilted (polar angle) electron beam shower…
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Keywords:
polar angle;
mask;
shadow mask;
mask deposition ... See more keywords