Articles with "mask pixelation" as a keyword



Photo from wikipedia

Efficient optical proximity correction based on virtual edge and mask pixelation with two-phase sampling.

Sign Up to like & get
recommendations!
Published in 2021 at "Optics express"

DOI: 10.1364/oe.415913

Abstract: Optical proximity correction (OPC) is a widely used resolution enhancement technique (RET) in optical lithography to improve the image fidelity and process robustness. The efficiency of OPC is very important, especially for full-chip modification with… read more here.

Keywords: mask; phase sampling; pixelation two; two phase ... See more keywords