Reference-free evaluation of thin films mass thickness and composition through energy dispersive X-ray spectroscopy
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DOI: 10.1016/j.matchar.2019.04.030
Abstract: Abstract In this paper we report the development of a new method for the evaluation of thin films mass thickness and composition based on the Energy Dispersive X-Ray Spectroscopy (EDS). The method exploits the theoretical… read more here.
Keywords: thickness composition; spectroscopy; mass thickness;