Multi frequency matching for voltage waveform tailoring
Sign Up to like & getrecommendations! Published in 2018 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/aad2cd
Abstract: Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribution functions, homogeneity of the ionflux or ionization dynamics. So… read more here.
Keywords: network; frequency; multi frequency; matching voltage ... See more keywords