Inorganic material profiling using Ar n + cluster: Can we achieve high quality profiles?
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DOI: 10.1016/j.apsusc.2018.02.159
Abstract: Abstract Retrieving molecular information by sputtering of organic systems has been concretized in the last years due to the introduction of sputtering by large gas clusters which drastically eliminated the compound degradation during the analysis… read more here.
Keywords: inorganic material; material profiling; profiling using; depth resolution ... See more keywords