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Material Sputtering with a Multi-Ion Species Plasma Focused Ion Beam

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1 Published in 2021 at "Advances in Materials Science and Engineering"

DOI: 10.1155/2021/8842777

Abstract: Focused ion beams are an essential tool for cross-sectional material analysis at the microscale, preparing TEM samples, and much more. New plasma ion sources allow for higher beam currents and options to use unconventional ion… read more here.

Keywords: ion species; ion; focused ion; material sputtering ... See more keywords