High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices
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DOI: 10.18494/sam.2019.2111
Abstract: Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to… read more here.
Keywords: composite acoustic; acoustic materials; high shear; materials aln ... See more keywords