Crystallographic Structure Analysis of a Ti-Ta Thin Film Materials Library Fabricated by Combinatorial Magnetron Sputtering.
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DOI: 10.1021/acscombsci.7b00135
Abstract: Ti-Ta thin films exhibit properties that are of interest for applications as microactuators and as biomedical implants. A Ti-Ta thin film materials library was deposited at T = 25 °C by magnetron sputtering employing the… read more here.
Keywords: phase; magnetron sputtering; thin film; materials library ... See more keywords