Investigation of the in-plane and out-of-plane electrical properties of metallic nanoparticles in dielectric matrix thin films elaborated by atomic layer deposition.
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DOI: 10.1088/1361-6528/aa8b5e
Abstract: Pt nanoparticles in a Al2O3 dielectric matrix thin films are elaborated by means of atomic layer deposition. These nanostructured thin films are integrated in vertical and planar test structures in order to assess both their… read more here.
Keywords: plane plane; thin films; films elaborated; dielectric matrix ... See more keywords