Practical Queueing Models for Preventive Maintenance Plan Optimization: Multiple Maintenance Types and Numerical Studies
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DOI: 10.1109/tsm.2020.3041789
Abstract: Preventive Maintenance (PM) activities in semiconductor manufacturing are important for equipment availability and reliability. Since PMs are down events that remove a tool from service, when to conduct a PM and how to group multiple… read more here.
Keywords: time; preventive maintenance; maintenance; mean cycle ... See more keywords