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Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-3866-6
Abstract: This paper mainly focuses on the investigation of different meandering techniques for the MEMS RF shunt capacitive switch. It involves three meandering techniques for the switch, namely zig-zag, plus and three square meander. Actuating beam…
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Keywords:
switch three;
step switch;
meandering techniques;
analysis uniform ... See more keywords