Measured element phase-shifting interferometry with a single piezoelectric transducer and low-friction workbench
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DOI: 10.1016/j.optlaseng.2019.105847
Abstract: Abstract Moving a large-aperture reference mirror (RM) with a significant weight through piezoelectric transducers (PZTs) for phase-shifting introduces considerable challenges and potential problems in conventional reference mirror phase-shifting interferometry (RMPSI). In this report, we present… read more here.
Keywords: phase; shifting interferometry; element phase; measured element ... See more keywords