Strain measurement of 3D structured nanodevices by EBSD.
Sign Up to like & getrecommendations! Published in 2018 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2017.08.009
Abstract: We present a new methodology to accurately measure strain magnitudes from 3D nanodevices using Electron Backscatter Diffraction (EBSD). Because the dimensions of features on these devices are smaller than the interaction volume for backscattered electrons,… read more here.
Keywords: strain; ebsd strain; strain measurement; measurement structured ... See more keywords
Strain Measurement of 3D Structured Nanodevices by EBSD
Sign Up to like & getrecommendations! Published in 2017 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927617007772
Abstract: Stress and strain effect the performance—mechanical and otherwise—of materials at all length scales. In semiconductors, strain has a strong influence on carrier mobility that is exploited by manufacturers to improve device characteristics including power efficiency.… read more here.
Keywords: microscopy; strain measurement; metrology; spatial resolution ... See more keywords