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Published in 2021 at "Plasma Sources Science and Technology"
DOI: 10.1088/1361-6595/ac2044
Abstract: We present measurements of the densities and temperatures (rotational and translational) of the metastable a1Δg (v = 0) state of O2 in a cylindrically symmetric RF driven plasma operating in inductive mode at 100 mTorr…
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Keywords:
oxygen low;
singlet molecular;
measurements singlet;
quantitative measurements ... See more keywords