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1
Published in 2020 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927620017353
Abstract: dD materials, such as graphene, have been hailed as wonder materials due to their enhanced mechanical and electrical properties [1]. These properties change as a function of the sample thickness, specifically with respect to the…
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Keywords:
number;
microscopy;
number layers;
measuring thickness ... See more keywords
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3
Published in 2022 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/ac5f69
Abstract: Optical reflection spectroscopy techniques offer a non-destructive and fast method of measuring the thickness of silicon (Si) epilayers, enabling very fast thickness uniformity mapping across the full surface of epiwafers up to 450 mm in…
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Keywords:
spectroscopy;
wafer;
approach;
reflection ... See more keywords
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1
Published in 2022 at "Applied optics"
DOI: 10.1364/ao.452042
Abstract: We developed a noncontact inspection method for measuring the thickness of surface-hardened layers using a laser ultrasonic technique in which a laser beam for generating ultrasonic surface waves was defocused on a specimen. Our method…
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Keywords:
surface;
hardened layers;
generation;
measuring thickness ... See more keywords
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Published in 2023 at "Applied Sciences"
DOI: 10.3390/app13085144
Abstract: The known amplitude-sensitive eddy-current method for measuring the thickness of non-conductive coatings on conductive non-magnetic base metals does not satisfy the accuracy requirements. A primary consideration is the significant influence of a change in the…
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Keywords:
thickness non;
eddy current;
base metals;
measuring thickness ... See more keywords