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Published in 2017 at "Photonics"
DOI: 10.3390/photonics4030043
Abstract: In this paper, physical modeling including optical and Casimir forces is adopted in order to analyze a nano-opto-mechanical actuator based on silicon-on-insulator suspended slot waveguides. Numerical simulations based on the finite element method and systematic…
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Keywords:
opto mechanical;
actuator based;
nano opto;
suspended slot ... See more keywords