Mechanical Polarization Switching in Hf0.5Zr0.5O2 Thin Film.
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DOI: 10.1021/acs.nanolett.2c01066
Abstract: HfO2-based films with high compatibility with Si and complementary metal-oxide semiconductors (CMOS) have been widely explored in recent years. In addition to ferroelectricity and antiferroelectricity, flexoelectricity, the coupling between polarization and a strain gradient, is… read more here.
Keywords: mechanical polarization; 5zr0 5o2; hf0 5zr0; film ... See more keywords