Photothermal Optical Beam Steering Using Large Deformation Multi-Layer Thin Film Structures
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DOI: 10.3390/mi12040428
Abstract: Photothermal actuation of microstructures remains an active area of research for microsystems that demand electrically isolated, remote, on-chip manipulation. In this study, large-deformation structures constructed from thin films traditional to microsystems were explored through both… read more here.
Keywords: mechanical tilt; photothermal optical; optical beam; large deformation ... See more keywords