The mechanism of growth of ZnO nanorods by reactive sputtering
Sign Up to like & getrecommendations! Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2016.12.097
Abstract: Abstract DC reactive magnetron sputtering of zinc target in argon-oxygen sputtering atmosphere has been used to grow ZnO thin films/nanorods on Si in a wide substrate temperature range of 300–750 °C and under different sputtering conditions,… read more here.
Keywords: sputtering atmosphere; substrate temperature; growth zno; mechanism growth ... See more keywords
Mechanism for growth initiation on aminosilane-functionalized SiO2 during area-selective atomic layer deposition of ZrO2
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Vacuum Science and Technology"
DOI: 10.1116/6.0000699
Abstract: The mechanism for growth initiation on the nongrowth surface during area-selective atomic layer deposition (ALD) processes is not well understood. In this study, we examine the ALD of ZrO2 on a SiO2 surface functionalized with… read more here.
Keywords: growth initiation; functionalized sio2; surface; zro2 ... See more keywords