LAUSR

Mechanistic Advantages of Organotin Molecular EUV Photoresists.

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0 Published in 2022 at "ACS applied materials & interfaces"

DOI: 10.1021/acsami.1c12411

Abstract: Extreme ultraviolet (EUV)-induced radiation exposure chemistry in organotin-oxo systems, represented by the archetypal [(R-Sn)12O14(OH)6](A)2 cage, has been investigated with density functional theory. Upholding existing experimental evidence of Sn-C cleavage-dominant chemistry, computations have revealed that either… read more here.

Keywords: molecular euv; euv; chemistry; advantages organotin ... See more keywords