Evolution and prevention of meltback etching: Case study of semipolar GaN growth on patterned silicon substrates
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DOI: 10.1063/1.5001914
Abstract: Meltback etching, a deteriorating chemical reaction occurring between gallium and silicon under typical metal organic chemical vapor deposition growth conditions, is a common problem that often limits the development of GaN on silicon substrates, in… read more here.
Keywords: meltback etching; silicon substrates; gallium; meltback ... See more keywords