A micromachined microphone based on the membrane with bias voltage and field-effect-transistor mechano-electrical transduction
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DOI: 10.1121/1.5014386
Abstract: Recently, capacitive-type microphone dominates the MEMS (Micro-Electro-Mechanical-System) microphone market. Since sizes of the electrodes on the membrane and backplate determine the sensitivity of the microphone, there is a limit in reducing the size of the… read more here.
Keywords: microphone; bias voltage; mems microphone; membrane bias ... See more keywords