Distributed sensing signal analysis of deformable plate/membrane mirrors
Sign Up to like & getrecommendations! Published in 2017 at "Mechanical Systems and Signal Processing"
DOI: 10.1016/j.ymssp.2017.04.028
Abstract: Abstract Deformable optical mirrors usually play key roles in aerospace and optical structural systems applied to space telescopes, radars, solar collectors, communication antennas, etc. Limited by the payload capacity of current launch vehicles, the deformable… read more here.
Keywords: plate membrane; membrane mirrors; sensing signal; distributed sensing ... See more keywords
MEMS Fabry–Pérot Interferometers With Double Membrane Mirrors for Improved Mirror Parallelism
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2018.2852839
Abstract: This paper presents surface micromachined MEMS Fabry–Pérot interferometers (FPIs) with two released membrane mirrors. Fabrication of such FPIs with large-area membrane reflectors of up to 5 mm in diameter for first-order operation in the near… read more here.
Keywords: membrane mirrors; mems fabry; fabry rot; rot interferometers ... See more keywords