Design and optimization of fully differential capacitive MEMS accelerometer based on surface micromachining
Sign Up to like & getrecommendations! Published in 2018 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-4187-5
Abstract: In this paper, design and simulation of a single-axial, capacitive, fully differential MEMS accelerometer based on surface micromachining with two proof masses is presented. So far, most surface micromachined capacitive accelerometers offered, employed differential interface… read more here.
Keywords: surface micromachining; surface; based surface; accelerometer based ... See more keywords
Resonant MEMS Accelerometer With CW Laser Excitation
Sign Up to like & getrecommendations! Published in 2020 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2020.3015291
Abstract: A silicon MEMS resonator which forms an optical cavity with its package is self-excited and interrogated with a CW laser beam at telecom wavelengths delivered to the device through optical fiber. Self-oscillation at 68 kHz… read more here.
Keywords: resonant mems; laser excitation; accelerometer laser; mems accelerometer ... See more keywords
Parasitic Resistance-Based High Precision Capacitive MEMS Accelerometer Phase Shift and Its Usage for Temperature Compensation
Sign Up to like & getrecommendations! Published in 2018 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2017.2777864
Abstract: A novel parasitic resistance-based high precision capacitive MEMS accelerometer temperature compensation method is proposed. The performance of MEMS accelerometer is severely affected by temperature drift. After a careful modeling analysis of the MEMS sensor, it… read more here.
Keywords: resistance based; parasitic resistance; temperature; temperature compensation ... See more keywords
A closed-loop readout interface for MEMS accelerometer with time-multiplexing electrostatic force feedback
Sign Up to like & getrecommendations! Published in 2019 at "Modern Physics Letters B"
DOI: 10.1142/s0217984919504475
Abstract: The noise and linearity performance of a MEMS accelerometer is a critical issue for land seismic acquisition applications. Incorporating closed-loop force feedback is an effective way to enhance th... read more here.
Keywords: loop readout; mems accelerometer; closed loop; force feedback ... See more keywords
A digital readout interface for a surface micromachined MEMS accelerometer with a novel loop compensator
Sign Up to like & getrecommendations! Published in 2020 at "Modern Physics Letters B"
DOI: 10.1142/s0217984920503029
Abstract: This paper proposes a novel digital readout interface for capacitive MEMS accelerometer. The digitalization is fulfilled by incorporating a 1-bit [Formula: see text] (sigma-delta) modulator into the closed servo loop. It both realizes a direct… read more here.
Keywords: readout interface; see text; formula see; digital readout ... See more keywords
Coarse-to-fine optical MEMS accelerometer design and simulation.
Sign Up to like & getrecommendations! Published in 2022 at "Applied optics"
DOI: 10.1364/ao.439762
Abstract: A coarse-to-fine optical microelectromechanical systems (MEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is proposed. The mechanical structure consists of a proof mass that is suspended by four L-shaped springs. The deflection of the proof… read more here.
Keywords: sensitivity; optical mems; fine optical; simulation ... See more keywords
Use of a MEMS accelerometer to measure orientation in a geotechnical centrifuge
Sign Up to like & getrecommendations! Published in 2018 at "International Journal of Physical Modelling in Geotechnics"
DOI: 10.1680/jphmg.16.00077
Abstract: Microelectromechanical systems (MEMS) accelerometers are becoming more prevalent in geotechnical engineering and geotechnical centrifuge modelling. In centrifuge experiments these sensors have show... read more here.
Keywords: use mems; accelerometer measure; mems accelerometer; centrifuge ... See more keywords
Accuracy Characterization of a MEMS Accelerometer for Vibration Monitoring in a Rotating Framework
Sign Up to like & getrecommendations! Published in 2023 at "Applied Sciences"
DOI: 10.3390/app13085070
Abstract: Active and passive vibration control systems are of paramount importance in many engineering applications. If an external load excites a structure’s resonance and the damping is too low, detrimental events, such as crack initiation, growth… read more here.
Keywords: system; vibration monitoring; accuracy; monitoring rotating ... See more keywords
Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
Sign Up to like & getrecommendations! Published in 2019 at "Micromachines"
DOI: 10.3390/mi10010050
Abstract: This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 μm application-specific integrated circuit (ASIC)-compatible CMOS/MEMS… read more here.
Keywords: accelerometer asic; cmos; cmos mems; implementation cmos ... See more keywords
A Hybrid Algorithm for Noise Suppression of MEMS Accelerometer Based on the Improved VMD and TFPF
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13060891
Abstract: High-G MEMS accelerometer (HGMA) is a new type of sensor; it has been widely used in high precision measurement and control fields. Inevitably, the accelerometer output signal contains random noise caused by the accelerometer itself,… read more here.
Keywords: improved vmd; dominated imfs; output; vmd tfpf ... See more keywords
A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13101608
Abstract: This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a… read more here.
Keywords: topology; cantilever; miniaturized piezoelectric; piezoelectric mems ... See more keywords