Characterization of MEMS Acoustic Sensors and Amplifiers in Cryogenic Fluids for Quench Detection Applications in HTS CICC
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Applied Superconductivity"
DOI: 10.1109/tasc.2021.3062784
Abstract: An acoustic quench detection method utilizing MEMS (Micro Electro-Mechanical System) acoustic sensors is proposed. To investigate this method, a commercially available MEMS piezoelectric microphone, the Vesper VM1000, and two types of second stage amplifiers, using… read more here.
Keywords: characterization mems; acoustic sensors; based amplifier; mems acoustic ... See more keywords
Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer
Sign Up to like & getrecommendations! Published in 2021 at "Micromachines"
DOI: 10.3390/mi13010074
Abstract: Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a… read more here.
Keywords: clamped micron; fabrication technology; novel fabrication; technology clamped ... See more keywords