Articles with "mems actuator" as a keyword



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Silicon optical add-drop filters with tunable power coupling using MEMS comb drive actuators

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Published in 2017 at "Optical Engineering"

DOI: 10.1117/1.oe.56.7.076110

Abstract: Abstract. We develop an optical ring resonator with tunable coupling coefficients for use in wavelength division multiplexing routers. The coupling coefficients of the resonator are precisely tuned by the utilization of an electrostatic comb drive… read more here.

Keywords: power; resonator; mems actuator; comb drive ... See more keywords
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Macro Modeling of V-Shaped Electro-Thermal MEMS Actuator with Human Error Factor

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Published in 2021 at "Micromachines"

DOI: 10.3390/mi12060622

Abstract: The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation… read more here.

Keywords: error; model; shaped electro; electro thermal ... See more keywords