Flexural–torsional modal interaction in MEMS actuators initiated by minuscule asymmetry
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DOI: 10.1007/s11071-024-10020-3
Abstract: An efficient actuation technique for electrostatic MEMS actuators exploiting electro-mechanical-mechanical modal interactions is proposed. The flexural–torsional equations of motion are established, and we manifest that the initiation of a 2:1 autoparametric modal interaction between in-plane… read more here.
Keywords: mems actuators; modal; modal interaction; motion ... See more keywords
MEMS Actuators for Optical Microendoscopy
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DOI: 10.3390/mi10020085
Abstract: Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today’s… read more here.
Keywords: microendoscopy; microscopy; mems actuators; technology ... See more keywords