Growth, structural and electrical properties of AlN/Si (111) for futuristic MEMS applications
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DOI: 10.1016/j.mssp.2020.105567
Abstract: Abstract This paper presents the structural, optical, and electrical characteristics of AlN thin films on Si (111) substrate grown by DC magnetron sputtering technique for MEMS applications. The grown AlN thin films (thickness: 680, 900,… read more here.
Keywords: structural electrical; films varies; aln 111; mems applications ... See more keywords